Abstract: Micro gas turbine generation system (MGTGS) has the advantages of low emission, high comprehensive efficiency and fast response. It gradually becomes a distributed power source with the ...
Micro Pressure Sensors of 50 μm Size Fabricated by a Standard CMOS Foundry and a Novel Post Process
Abstract: This paper describes a piezoresistive micro pressure sensor with a size of 50μm made by a standard CMOS foundry and a novel post process. The material of the sensor diaphragm is silicon ...
Some results have been hidden because they may be inaccessible to you
Show inaccessible results