Simultaneously detecting multiple signals with high precision has long challenged microelectromechanical systems (MEMS) sensors due to unavoidable interference. A new study presents a solution: a ...
(a) Schematic of original Huygens’s clock. (b) Structure of MEMS Huygens clock system. (c) Operating mode of MEMS resonator. (d) Image of microfabricated MEMS resonator. PLL: phase locked loop; TIA: ...
Semiconductor engineers leveraged manufacturing techniques developed for computer chips to create microscopic MEMS devices. Fabrication methods for MEMS sensors, such as layer deposition, ...
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