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researchgate.net
(PDF) Plasma Etch in the Era of Atomic Scale Fidelity
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AR Fast Etch oBARCs for Microlithography | DuPont
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Atomic Layer Etching | Impedans
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Atomic layer etching | Semantic Scholar
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Atomic layer etching | Semantic Scholar
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Mechanism of the selective electrochemical etching for the (a) SAC305 ...
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Analysis of the influence of etching in the pattern. (a) Pattern image ...
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Figure 6 - Implementatio…
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New Atomic Layer Etching Capability Enables Continued Device Scaling
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Challenges in etching of the SAC architecture. (a) The substrate is ...
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Schematics diagram of a SAC process. Each picture represents a ...
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ResearchGate
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SPIE Advanced Lithography / 2021 Digital Forum | News Room | Tokyo ...
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Silicon atomic layer etching method - Eureka | Patsnap
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